异空间异尺寸基材对位方法

Different-space different-size substrate alignment method

Abstract

The invention relates to a different-space different-size substrate alignment method, which comprises: capturing actual local images of two substrates with different sizes; comparing the particular labels of the two substrates within the standard local character regions, and acquiring the particular labels of the two substrates within the actual local character regions; respectively establishing actual coordinate systems of the two substrates so as to synthesize an alignment assembly coordinate system; comparing the coordinate values of the particular labels of the two substrates within the two actual coordinate systems so as to acquire a first group of offsets, and comparing the sizes of the two substrates so as to obtain the size difference; using the first group of the offsets and the size difference to correct the coordinate value of the particular label of one of the two substrates; comparing the coordinate values of the particular labels of the two substrates so as to acquire a second group of offsets; and moving the substrate to the position compensated by the second group of the offsets.
一种异空间异尺寸基材对位方法,包括:撷取不同尺寸的二基板的实际局部图像;比对该二基板的标准局部特征区域内的特定标记,并取得该二基板的实际局部特征区域内的特定标记;分别建立该二基板的实际坐标系统,以合成一对位组装坐标系统;比对该二实际坐标系统中的二基板的特定标记的坐标值以取得第一组偏移量,并比对该二基板的尺寸以取得尺寸差量;利用该第一组偏移量及该尺寸差量,修正该二基板的其中一基板的特定标记的坐标值;比对该二基板的特定标记的坐标值,以取得第二组偏移量;将该基板移动至该第二组偏移量所补偿的位置。

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